Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments
作者： Francesc Salvat-Pujol , Roser Valentí , Wolfgang S Werner
DOI: 10.3762/BJNANO.6.129
关键词: Electron 、 Secondary electrons 、 Materials science 、 Deposition (phase transition) 、 Spectral line 、 Secondary emission 、 Work (thermodynamics) 、 Electron transport chain 、 Molecular physics 、 Nanotechnology 、 Electron beam-induced deposition
摘要: The aim of the present overview article is to raise awareness an essential aspect that usually not accounted for in modelling electron transport focused-electron-beam-induced deposition (FEBID) nanostructures: Surface excitations are on one hand responsible a sizeable fraction intensity reflection-electron-energy-loss spectra primary energies up few kiloelectronvolts and, other hand, they play key role emission secondary electrons from solids, regardless energy. In this work we general perspective recent works subject surface and low-energy transport, highlighting most relevant aspects FEBID simulations.
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