Farbication of UV photodetector from nickel oxide nanoparticles deposited on silicon substrate by closed-field unbalanced dual magnetron sputtering techniques
作者： Oday A. Hammadi , Mohammed K. Khalaf , Firas J. Kadhim
DOI: 10.1007/S11082-015-0247-6
关键词: Silicon 、 Substrate (electronics) 、 Optoelectronics 、 Nanostructure 、 Photodetector 、 Nickel oxide 、 Nanoparticle 、 Quantum efficiency 、 Sputter deposition 、 Materials science
摘要: In this work, a UV photodetector was fabricated by depositing 25 nm nickel oxide nanoparticles on an n-type silicon substrate closed-field unbalanced dual magnetron sputtering technique. The showed maximum spectral responsivity of 4.8 mA/W at 318 with quantum efficiency 1.87 %. This is good attempt to produce such nanostructures high quality and low cost for detection application.
springer.com
paperity.org参考文章(7)
Euan James Ferguson Ross, B. P. Straughan, Norman Neill Greenwood, Index of vibrational spectra of inorganic and organometallic compounds ,(1975)
Handbook of transparent conductors Springer US. ,(2011) , 10.1007/978-1-4419-1638-9
Raid A. Ismail, Sa’ad Ghafori, Ghada A. Kadhim, Preparation and characterization of nanostructured nickel oxide thin films by spray pyrolysis Applied Nanoscience. ,vol. 3, pp. 509- 514 ,(2013) , 10.1007/S13204-012-0152-2
P.S Patil, L.D Kadam, Preparation and characterization of spray pyrolyzed nickel oxide (NiO) thin films Applied Surface Science. ,vol. 199, pp. 211- 221 ,(2002) , 10.1016/S0169-4332(02)00839-5
A.B.C Ekwealor, F. I. Ezema, R.U. Osuji, Optical properties of chemical bath deposited nickel oxide (NiOx) thin films Superficies y vacío. ,vol. 21, pp. 6- 10 ,(2008)
Sharanabasava V Ganachari, Ravishankar Bhat, Venkataraman A, Raghunandan Deshpande, Synthesis and characterization of nickel oxide nanoparticles by self-propagating low temperature combustion method Recent Research in Science and Technology. ,vol. 4, pp. 50- 53 ,(2012)
Romana Cerc Korosec, Peter Bukovec, Sol-Gel Prepared NiO Thin Films for Electrochromic Applications Acta Chimica Slovenica. ,vol. 53, pp. 136- 147 ,(2006)