Characteristics of ZnO–Cu–ZnO multilayer films on copper layer properties
作者： D.R. Sahu , Jow-Lay Huang
DOI: 10.1016/J.APSUSC.2006.01.023
关键词: Scanning electron microscope 、 Copper 、 Transmittance 、 Sputter deposition 、 Sheet resistance 、 Materials science 、 Oxide 、 Composite material 、 Electrical conductor 、 Annealing (metallurgy) 、 Analytical chemistry
摘要: ZnO/Cu/ZnO multilayers on glass with different copper layer thickness were prepared by simultaneous RF magnetron sputtering of ZnO and dc magnetron sputtering of Cu. Different …
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