作者: Ricardo Garcı́a , Montserrat Calleja , Heinrich Rohrer
DOI: 10.1063/1.370985
关键词: Photoconductive atomic force microscopy 、 Optoelectronics 、 Materials science 、 Atomic force acoustic microscopy 、 Local oxidation nanolithography 、 Conductive atomic force microscopy 、 Microscopy 、 Kelvin probe force microscope 、 Nanotechnology 、 Non-contact atomic force microscopy 、 Silicon
摘要: Nanometer-size water bridges have been used to confine the oxidation of silicon surfaces with a noncontact atomic force microscope. The formation bridge between two separated by gap few nanometers is driven application an electrical field. Once liquid formed, its length and neck diameter can be modified changing tip-sample separation. provides ionic species spatial confinement pattern Si(100) in microscopy. method applied write arrays several thousands dots periodicity 40 nm average width 10 nm.