Three dimensional surface depression profiling using focused air coupled ultrasonic pulses

摘要: Surface topography is an important variable in the performance of many industrial components and normally measured with diamond tip profilometry over a small area or by using optical scattering methods for larger measurement. This article shows quantitative surface profiles as obtained 1 MHz focused air coupled ultrasonic pulses. The were system developed NASA Glenn Research Center Sonix, Inc., via formal cooperative agreement. method simple reproducible because it relies mainly on knowledge constancy sound velocity through air. transducer scanned across sends pulses to sample where they are reflected back from along same path incident wave. Time flight images acquired converted depth/surface profile relation (d = V x t/2) between distance d, time t V. In this article, resolution determined results shown platelike cylindrical (curved) samples, Impressive all samples when compared measurements micro thickness gages. completely nondestructive, noninvasive, noncontact does not require light reflective surfaces.