Evaluation of the performance of tilt scanning interferometry for tomographic imaging and profilometry
作者： B.S.H. Burlison , P.D. Ruiz , J.M. Huntley
DOI: 10.1016/J.OPTCOM.2011.12.025
关键词: Tilt (optics) 、 Interferometry 、 Wavefront 、 Chirp 、 Imaging phantom 、 Optical coherence tomography 、 Tomographic reconstruction 、 Iterative reconstruction 、 Optics 、 Materials science
摘要: In this paper we investigate the performance of Tilt Scanning Interferometry in tomographic imaging and profilometry applications, with an emphasis on factors that limit quality image reconstruction. Depth resolution is mainly degraded by a frequency chirp appears temporal interference signal when large tilting range scanned. It shown through numerical simulation depends curvature illumination wavefront also position pivot axis beam. Data processing methods are proposed to overcome these limitations their effects illustrated experimental measurements opaque surfaces weakly scattering phantom internal features. The effect speckle decorrelation discussed.
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