Multiple chamber integrated process system

摘要: An integrated modular multiple chamber vacuum processing system is disclosed. The includes a load lock, may include an external cassette elevator, and internal lock wafer also stations about the periphery of for connecting one, two or several process chambers to chamber. A robot mounted within utilizes concentric shaft drive connected end effector via dual four-bar link mechanism imparting selected R-θ movement blade unload wafers at elevator individual chambers. uniquely adapted enabling various types IC including etch, deposition, sputtering rapid thermal annealing chambers, thereby providing opportunity step, sequential using different processes.