Micro mechanical systems : principles and technology
作者： W. Menz , T. Fukuda
DOI:
关键词: Tribology 、 Mechanical engineering 、 Energy source 、 Materials science 、 Machine tool 、 Microsystem 、 Control methods 、 Nanotechnology 、 Mechanical system 、 Microfabrication
摘要: * Introduction Photolithographic Microfabrication Micromaching by Machine Tools Tribological Aspects of Microsystems Silicon Microsensors Micro-Actuators for Micro-Robots: Electric and Magnetic Energy Source Power Supply Method Control Micro Mechanical Systems Examples Future Problems
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