Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering

作者: W. Gulbiński , S. Mathur , H. Shen , T. Suszko , A. Gilewicz

DOI: 10.1016/J.APSUSC.2004.05.278

关键词: MetallurgySputter depositionIndentation hardnessThin filmMicrostructureTitaniumSputteringNanocompositeTitanium carbideChemical engineeringMaterials scienceSurfaces, Coatings and Films

摘要: Abstract Titanium carbide/amorphous-carbon (TiC/a-C:H) nanocomposite coatings deposited by pulsed unbalanced reactive magnetron sputtering have been investigated in terms of structure, chemical and phase composition AFM, TEM, XPS XRD analyses. Subject to total carbon content, metallic titanium, titanium carbide amorphous-carbon phases were found the coatings, which contributed observed microstructures morphologies. The specific resistivity scales up with increasing amount matrix-forming carbon. Hardness profiles different compositions revealed that nearly stoichiometric TiC films average crystallite size 70 nm exhibit maximum hardness, whereas lowest friction coefficient (μ

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