Characteristics of trace of Sn-doped IZO thin films deposited by DC magnetron sputtering using single target

作者： Pung-Keun Song , Hyun-Jun Lee

DOI:

关键词: Electrical engineering 、 Optoelectronics 、 Trace (semiology) 、 Sputter deposition 、 Doping 、 Thin film 、 Materials science