Transparent Aluminum Nanomesh Electrode Fabricated by Nanopatterning Using Self-Assembled Nanoparticles

作者: Tsutomu Nakanishi , Eishi Tsutsumi , Kumi Masunaga , Akira Fujimoto , Koji Asakawa

DOI: 10.1143/APEX.4.025201

关键词: NanomeshParticleNanotechnologyTransmittanceNanoparticleMonolayerAluminiumIndium tin oxideMaterials scienceElectrode

摘要: A novel transparent aluminum nanomesh electrode with nanoapartures smaller than the wavelength of light was proposed. Unlike conventional conducting oxides such as indium tin oxide, it has potential to realize a rare-metal-free and low-resistivity electrode. It fabricated by nanopatterning our embedded particle monolayer method, which enables formation self-assembled over large area, its optical properties were investigated. As result, transmittance found be more 55% at peak when opening ratio 47%.

参考文章(24)
T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, P. A. Wolff, Extraordinary optical transmission through sub-wavelength hole arrays Nature. ,vol. 391, pp. 667- 669 ,(1998) , 10.1038/35570
Tadatsugu Minami, Transparent conducting oxide semiconductors for transparent electrodes Semiconductor Science and Technology. ,vol. 20, ,(2005) , 10.1088/0268-1242/20/4/004
Yasin Ekinci, Harun H. Solak, Christian David, Extraordinary optical transmission in the ultraviolet region through aluminum hole arrays. Optics Letters. ,vol. 32, pp. 172- 174 ,(2007) , 10.1364/OL.32.000172
C. Liu, V. Kamaev, Z. V. Vardeny, Efficiency enhancement of an organic light-emitting diode with a cathode forming two-dimensional periodic hole array Applied Physics Letters. ,vol. 86, pp. 143501- ,(2005) , 10.1063/1.1895481
Shih-Hui Chang, Stephen K. Gray, George C. Schatz, Surface plasmon generation and light transmission by isolated nanoholes and arrays of nanoholes in thin metal films Optics Express. ,vol. 13, pp. 3150- 3165 ,(2005) , 10.1364/OPEX.13.003150
Wolfgan E. Frank, Approaches for patterning of aluminum Microelectronic Engineering. ,vol. 33, pp. 85- 100 ,(1996) , 10.1016/S0167-9317(96)00034-2
A. Hultåker, C.G. Granqvist, Transparent and conducting ITO films: new developments and applications Thin Solid Films. ,vol. 411, pp. 1- 5 ,(2002) , 10.1016/S0040-6090(02)00163-3
Yi-Tsung Chang, Tzu-Hung Chuang, Ming-Wei Tsai, Lung-Chien Chen, Si-Chen Lee, Dispersion relation of Al∕Si surface plasmon in hexagonally ordered aluminum hole arrays Journal of Applied Physics. ,vol. 101, pp. 054305- ,(2007) , 10.1063/1.2435069
H. F. Ghaemi, Tineke Thio, D. E. Grupp, T. W. Ebbesen, H. J. Lezec, Surface plasmons enhance optical transmission through subwavelength holes Physical Review B. ,vol. 58, pp. 6779- 6782 ,(1998) , 10.1103/PHYSREVB.58.6779
M. Tong, A. S. Kirakosyan, T. V. Shahbazyan, Z. V. Vardeny, Ultrafast response of surface electromagnetic waves in an aluminum film perforated with subwavelength hole arrays. Physical Review Letters. ,vol. 100, pp. 056808- ,(2008) , 10.1103/PHYSREVLETT.100.056808