190nm excimer laser drilling of glass slices: Dependence of drilling rate and via hole shape on the diameter of the via hole
作者： K. H. Chen , Wenhsing Wu , Byung Hwan Chu , C. F. Lo , Jenshan Lin
DOI: 10.1116/1.3253389
关键词: Laser beam machining 、 Laser drilling 、 Excimer laser 、 Conical surface 、 Materials science 、 Funnel 、 Optics 、 Drilling 、 Reflection (mathematics) 、 Laser
摘要: The authors have investigated the effect of via hole diameter on laser drilling rate glass as well shape drilled holes. An Ar–F2 based 193nm UV excimer was used in this study. holes with a 120μm showed 7.5°–9° angled, tapered side wall, and relatively constant at around 17μm∕s. For smaller diameters ranging from 30–80μm, significantly different results were obtained due to reflection wall leading being slightly increased becoming conical shape. smallest an entrance 10μm, resulting very high aspect ratio, funnel shaped reduced rate.
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