作者: R. Siegele , J. Roth , B. M. U. Scherzer , S. J. Pennycook
DOI: 10.1063/1.353126
关键词: Atomic physics 、 Transmission electron microscopy 、 Chemistry 、 Nuclear reaction analysis 、 Fluence 、 Range (particle radiation) 、 Ion implantation 、 Deuterium 、 Analytical chemistry 、 Pyrolytic carbon 、 Highly oriented pyrolytic graphite
摘要: In this work the buildup of damage due to deuterium implantation in highly‐oriented pyrolytic graphite (HOPG) is investigated. HOPG was implanted with 10–30 keV D3+ at different target temperatures between room temperature and 773 K fluences from 1014 1018 D/cm2. Subsequently, retained were measured by Rutherford backscattering (RBS) a channeling direction (RBSc) D(3He, p)α nuclear reaction analysis (NRA), respectively. The selected samples additionally observed transmission electron microscopy (TEM). initial trapping efficiency unity whole energy range. maximum retention deuterium, however, depends on energy. RBSc starts saturate 5×1015 D/cm2 (295 K) 1.3×1017 (773 K). Both are well below fluence which amorphization TEM.