Formation of thin oxide layers
作者： Albert Servais , Pierre Bohain , Emile Plumat
DOI:
关键词: Thin oxide 、 Water vapor 、 Substrate (printing) 、 Coating 、 Solvent 、 Chemistry 、 Chemical engineering 、 Analytical chemistry
摘要: Coating apparatus includes plural chambers having at least restricted communication therebetween to inhibit the transfer of fluid treating material but not a substrate. A primary chamber means for supplying vapor solvent, applying spray solution and delivering water vapor. Heating are provided.
lens.org 参考文章(6)
Charles H Jung, Bennett Charles Robert, Fluidized bed generated by vibratory means ,(1961)
Ludwig Schwank, Hans-Gunther Kadereit, Wilhelm Kafka, Isolde Dietrich, Power-current cryotron ,(1966)
Philip R Hendrixson, Method of applying an organic film coating by spraying ,(1955)
Lewis R Koller, Method of rendering titanium dioxide films electrically conductive ,(1954)
Giovanni Bossi, Bruno Pasqualini, Coating and oven system including work handling means ,(1963)
Darrel M Harris, Epitaxial deposition reactor ,(1965)