Holder for semiconductor wafers and flat substrates

摘要: A holder for a flat substrate, such as example semiconductor wafer or glass slide, has fixture with sample insertion groove holding the multiple grooves substrates. The also channel milled perpendicular to groove. may be machined that two portions of open opposite sides fixture. Positioned in is cantilever spring securing substrate contain single extends an entire length channel, springs. include post, dove tail, screw, clamp mounting on stage inside vacuum chamber instrument.