Influence of Source/Drain Electrodes on the Properties of Zinc Tin Oxide Transparent Thin Film Transistors

作者: Tae Young Ma , Mu Hee Cho

DOI: 10.4313/JKEM.2015.28.7.433

关键词: Threshold voltageMaterials scienceIndiumOptoelectronicsWaferThin-film transistorIndium tin oxideConductivityInorganic chemistryElectrodeAluminium

摘要: Zinc tin oxide transparent thin film transistors (ZTO TTFTs) were fabricated by using Si wafers as gate electrodes. Indium (In), aluminum (Al), indium (ITO), silver (Ag), and gold (Au) employed for source drain electrodes, the mobility threshold voltage of ZTO TTFTs observed a function electrode. The adopting In electrodes showed highest lowest voltage. It was shown that Ag Au are not suitable TTFTs. As results this study, it is considered interface properties electrode/ZTO more influential in than conductivity

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