Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
作者： Marc A Unger , Hou-Pu Chou , Todd Thorsen , Axel Scherer , Stephen R Quake
DOI: 10.1126/SCIENCE.288.5463.113
关键词: Multilayer soft lithography 、 Soft lithography 、 Microfluidics 、 Lithography 、 Nanolithography 、 Nanotechnology 、 Surface micromachining 、 Fabrication 、 Micropump
摘要: … We describe here an extension to the soft lithography paradigm, multilayer soft … soft lithography, we fabricated active valves and pumps. Monolithic elastomeric valves and pumps, like …
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