Closed loop liquid cooling for semiconductor RF amplifier modules

摘要: A closed loop liquid cooling system for an RF transistor module including a plurality of elongated microchannels connected between pair coolant manifolds conducting beneath one or more dies to dissipate the heat generated thereby, exchanger, miniature circulating pump located on module, and passive check valves having tapered passages controlling flow in loop. The are truncated passage microchannel no moving parts fabricated so as be part either pump, manifolds, microchannels.