Atomic force microscopy nanolithography: fabrication of metallic nano-slits using silicon nitride tips
作者： Tobias König , Thomas Papke , Alexey Kopyshev , Svetlana Santer
DOI: 10.1007/S10853-013-7188-X
关键词: Nano- 、 Local oxidation nanolithography 、 Nanolithography 、 Nanotechnology 、 Diamond 、 Conductive atomic force microscopy 、 Silicon nitride 、 Fabrication 、 Materials science 、 Metal
摘要: In this paper, we report on the properties of nano-slits created in metal thin films using atomic force microscope (AFM) nanolithography (AFM-NL). We demonstrate that instead expensive diamond AFM tips, it is also possible to use low cost silicon nitride tips. It shown depending direction scratching, different widths and depths can be fabricated at constant load force. elucidate reasons for behavior identify an optimal scratching a gold layer.
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