Micromachined semiconductor gas sensors
作者： D. Briand , J. Courbat
DOI: 10.1533/9780857098665.2.220
关键词: Oxide 、 Transducer 、 Silicon on insulator 、 Nanowire 、 Materials science 、 Oxide semiconductor 、 Field effect 、 Semiconductor 、 Nanotechnology 、 Silicon micromachining
摘要: Abstract This chapter reviews micromachined semiconductor gas sensors. First, this briefly discusses the history of technology. It then addresses microhotplates' concept that has led to development different types sensor devices. The realizations sensors are presented: thin- and thick-film metal oxide, field effect, those using complementary oxide semiconductors silicon on insulator technologies. Recent developments gas-sensitive nanostructures integrated transducers polymeric foil their printing highlighted. Finally, industrialization is addressed.
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