SOLID-STATE IMAGE PICKUP DEVICE AND ITS MANUFACTURE

摘要: PURPOSE: To improve light-collecting efficiency in a microlens layer, increase sensitivity and smear, reduce dark noise level white defects. CONSTITUTION: An insulating film of single layer is deposited on light shielding 12 photoelectric conversion part 5 by using CVD method. The surface the flattened polishing, thinned, 13 formed. Thereby obliquely incident increased. Since made unnecessary refraction reflection are not generated. flat method, wet etching technique adopted. defects reduced.