Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated by plasma-enhanced chemical vapour deposition
作者： A. Sabac , C. Gorecki , M. Jozwik , L. Nieradko , C. Meunier
关键词: Microelectromechanical systems 、 Single-mode optical fiber 、 Silicon oxynitride 、 Substrate (electronics) 、 Optoelectronics 、 Materials science 、 Waveguide 、 Optical fiber 、 Plasma-enhanced chemical vapor deposition 、 Thin film
摘要: The technology and performances of a micromachined channel waveguides, based on PECVD deposition silicon oxynitride (SiOxNy) thin films, is presented. parameters the process are studied in connection with their optical, mechanical chemical properties. Waveguide deign optimized allowing single mode, low loss propagation high efficiency coupling mode optical fiber. proposed applied to fabricate pigtailed Mach-Zehnder interferometers, where from fiber waveguide etch U-grooves, supporting fibers same substrate as substrate.
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