A Smoothed Raster Scanning Trajectory Based on Acceleration-Continuous B-Spline Transition for High-Speed Atomic Force Microscopy

摘要: The scanning speed of atomic force microscopes (AFMs) is typically limited by the frequency triangular trajectory used in generating raster scan. This because higher harmonics have a tendency to excite mechanical resonances nanopositioners incorporated AFM; thereby, introducing significant positioning errors. To address this issue, article proposes novel smoothing method enable high-speed scanning. proposed utilizes acceleration-continuous B-spline replace backward path for fast axis. As result, advantage uniform sampling along forward preserved. generation process described detail. A hysteresis compensation employed improve tracking performance scanner. Experiments conducted on commercial piezoelectric tube scanner are presented demonstrate improvement delivered when compared with traditional method. It shown that enables five-fold achievable rate, from 10 50 Hz.