Illumination optical arrangement
作者： Makoto Uehara , Masato Shibuya
DOI:
关键词: Light source 、 Optics 、 Beam (structure) 、 Physics 、 Optoelectronics
摘要: An illumination optical arrangement comprises light source means emitting a coherent beam, and for forming substantially incoherent from the beam. The includes periodically deflecting beam scanning predetermined area by plurality of paths directing passed through to different secondary areas. Each areas is scanned deflected
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