Ultra-thin all-solid-state micro-supercapacitors with exceptional performance and device flexibility

作者: Theresia Göhlert , Pablo F. Siles , Tom Päßler , Robert Sommer , Stefan Baunack

DOI: 10.1016/J.NANOEN.2017.01.054

关键词: Materials scienceVoltageEnergy storageElectrolyteSupercapacitorLithiumOptoelectronicsActive layerCobalt oxideElectrical engineeringFlexible electronics

摘要: Abstract Relying on the combination of lithium phosphorous oxynitride (LiPON) as electrolyte and cobalt oxide (Co3O4) electrode material it is possible to fabricate symmetric all-solid-state micro-supercapacitors (ASTSCaps) rigid flexible substrates. Due nanoscale active layer dimensions, excellent performance component materials high nominal voltage 2 V, an exceptionally volumetric energy power densities up 8 (±2) mW h/cm3 16 (±2) W/cm3, respectively, are obtained. These results going far beyond current state-of-the-art limits. The ASTSCaps temperature stable 215 °C (for 1 V voltage) experience endurance more than 30,000 cycles. ultra-thin bring strong benefits for on-chip storage open interesting new avenues autonomous electronic microsystems.

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