High Temperature Polymers For Electronic Devices

作者: J. Economy

DOI: 10.1007/978-1-4613-2759-2_14

关键词: Polyamic acidIBMPolymerNanotechnologyElectronicsMicroelectronicsMaterials scienceDielectric

摘要: In this paper, the potential advantages of polymers as dielectric insulating layers in advanced microelectronic devices are described along with requirements for their use chips. Some key results obtained from a detailed study polyimides carried out within IBM summarized efforts aimed at optimizing polyamic acid precursor to achieve improved processibility. Finally, some preliminary work on new type high temperature polymer that appears satisfy many shortcomings existing systems.

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