EUV spectra of Rb-like to Ni-like dysprosium ions in an electron beam ion trap

作者: Deirdre Kilbane , Gerald O’Sullivan , Yuri A. Podpaly , John D. Gillaspy , Joseph Reader

DOI: 10.1140/EPJD/E2014-50149-8

关键词: SpectrometerDysprosiumAtomic physicsExtreme ultravioletExtreme ultraviolet lithographyMaterials scienceSpectral lineElectron beam ion trapIonExcited state

摘要: Extreme ultraviolet radiation emitted from highly-charged dysprosium ions was measured at the National Institute of Standards and Technology. The were created, trapped, excited in an electron beam ion trap (EBIT), spectra recorded with a flat-field grazing-incidence spectrometer wavelength range 3 nm to 17 nm. Tuning energies between 1.2 keV 2.0 resulted selection Rb-like Dy29+ Ni-like Dy38+ ions. Identification strong n = 4-n 4 transitions achieved by collisional-radiative modeling EBIT plasma. A total 64 spectral lines recorded, including 54 new identifications.

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