Shape measurement apparatus and method
作者： Joong-Ki Jeong , Min-Young Kim , Seung-Jun Lee
DOI:
关键词: Blocking (radio) 、 Optics 、 Reliability (statistics) 、 Grating 、 Materials science 、 Light source 、 Substrate (printing) 、 Section (archaeology) 、 Lens (optics)
摘要: A shape measurement apparatus includes a work stage supporting target substrate, pattern-projecting section including light source, grating part partially transmitting and blocking generated by the source to generate image projecting lens making on of an image-capturing capturing reflected control controlling stage, section, calculating reliability index phases image, which is corresponding target, inspecting using phases. Thus, accuracy may be enhanced.
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