Method and apparatus for accurate calibration of VUV reflectometer
作者： Dale A. Harrison
DOI:
关键词: Standard sample 、 Reference sample 、 Calibration 、 Wavelength 、 Sample (graphics) 、 Reflectivity 、 Remote sensing 、 Optics 、 Materials science
摘要: A calibration technique is provided that utilizes a standard sample allows for in the wavelengths of interest even when may exhibit significant reflectance variations at those subtle properties sample. second sample, reference have relatively featureless spectrum over same spectral region and used combination with to achieve calibration. In one embodiment include VUV region.
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