INK-JET RECORDING HEAD, ITS MANUFACTURING METHOD AND ITS MANUFACTURING DEVICE
作者： Ochi Norihiro , Yoshimura Hisashi , Irihara Kouichi , Kubota Koji , Kanayama Yoshio
DOI:
关键词: Recording head 、 Oxygen gas 、 Orifice plate 、 Suction 、 Acoustics 、 Materials science 、 Laser beams 、 Excimer laser
摘要: PURPOSE: To provide a method for manufacturing an ink-jet recording head which eliminates sticking of carbon to orifice plate and is hardly flawed with laser beam. CONSTITUTION: The blowing 30 suction removal 31 oxygen gas are performed on the same surface side 11 from both sides across part be irradiated by excimer 22; also, inside hollowed, put placing table 26 provided plural air vents communicating hollow; fixed sucking hollow.
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