Effect of microwave power on diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition
作者： S.F. Yoon , K.H. Tan , J. Rusli , Ahn , Q.F. Huang
DOI: 10.1016/S0925-9635(00)00360-5
关键词: Electron cyclotron resonance 、 Plasma diagnostics 、 Microwave 、 Raman spectroscopy 、 Carbon film 、 Deposition (phase transition) 、 Analytical chemistry 、 Chemistry 、 Diamond-like carbon 、 Chemical vapor deposition
摘要: Abstract Diamond-like carbon (DLC) films have been deposited using electron cyclotron resonance chemical vapor deposition (ECR-CVD) under various microwave power conditions. Langmuir probe measurement and optical emission spectroscopy (OES) were used to characterize the ECR plasma, while characterized Raman infrared (IR) spectroscopies, hardness gap measurements. It was found that ion density all signal peaks in (OE) spectra increased monotonously following increase power. measurements indicate become more graphitic with lower content of sp3-hybridized atoms as increased. IR a reduction hydrogen decrease for film produced at relatively high powers. A mechanism is described which involved bombardment surfaces hydrogen–surface interactions. The rate DLC correlated CH3 density.
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