Method for forming a capacitor with electrically interconnected construction
作者： Paul Schuele , Gurtej S. Sandhu , Wayne Kinney
DOI:
关键词: Materials science 、 Electrical connection 、 Electrical engineering 、 Layer (electronics) 、 Electrical conductor 、 Optoelectronics 、 Oxide 、 Barrier layer 、 Interconnection 、 Capacitor 、 Electrical interconnect
摘要: A method of forming a capacitor includes, a) providing node to which electrical connection is be made; b) an electrically conductive first layer over the node; c) insulative barrier second layer; d) third layer, comprising material either and resistant oxidation, or forms upon oxidation; e) insulating inorganic metal oxide dielectric f) fourth g) interconnect extend layers. construction having such in combination with plate disclosed.
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