Sputter deposition of large-area double-sided YBCO superconducting films

摘要: Abstract: Research in the field of high-temperature superconducting films has progressed from study their basic chemistry and structure, to a point where an enormous range desirable properties are being explored for device applications. This review focuses on synthesis large-area double-sided YBa 2 Cu 3 O 7 – δ (YBCO) thickness-dependent superconductivity. Double-sided YBCO thin were prepared by sputter deposition. In order achieve good performance lateral homogeneity (up 3-inch) multi-pole devices or low frequency application, we developed special modulated biaxial rotation designing substrate clamp, combining out-of-plane with automatic interval in-plane rotation, simultaneously changing speed periodically every revolution (namely, rotation). The its development was also used partially avoid negative oxygen ion bombardment that resulted plate target geometry. high-quality deposited various single-crystal substrates such as LaAlO , SrTiO MgO typical electronic properties: transition temperature ( T c ) 90  K, critical current density J 2–4  MA/cm at 77  K self-field microwave surface resistance R s 0.5  μΩ 10  GHz 77  K, which successfully applied prepare high including resonators, oscillators, filters. this chapter, thickness dependence residual stress investigated. results demonstrated values strongly dependent film thickness. chapter outlines reasons underlying calculation demonstrates levels control now possible.