Direct observation of energetic-particle-beam-induced effects in the Argonne national laboratory high voltage electron microscope
作者： A. Taylor , E.A. Ryan , A. Philippides , J.R. Wallace
DOI: 10.1016/0025-5416(85)90347-7
关键词: Atomic physics 、 Ion beam 、 Ion 、 High voltage electron microscopy 、 Electron 、 Materials science 、 Environmental scanning electron microscope 、 Electron beam-induced deposition 、 Particle beam 、 Beam (structure) 、 General Engineering
摘要: Abstract Direct observations in the high voltage electron microscope of electron- and ion-beam-induced effects solids now form a significant part research activity at Argonne National Laboratory High Voltage Electron Microscope Tandem Facility. The programs utilize unique facilities that permit samples held temperatures between 10 1300 K to be bombarded vacuo with ions having energies 20 keV 8 MeV. Instrumentation both internal external has been provided characterize fully ion beam specimen rod over wide range intensities. Several studies radiation damage pure metals model alloys have contributed an advancement understanding defect production cascade behavior are reviewed. A recent study amorphization CuBi bilayer film is also given.
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