Handbook of Static Secondary Ion Mass Spectrometry
作者： J.C. Vickerman , F. Adams , Alan Brown , David Briggs
DOI:
关键词: Characterization (materials science) 、 Oxide 、 Semiconductor materials 、 Static secondary-ion mass spectrometry 、 Analytical chemistry 、 Semiconductor device 、 Surface chemical 、 Chemistry
摘要: Part 1 Static secondary ion mass spectrometry for surface chemical characterization: the SIMS phenomenon experimental parameters experiment procedures used in acquisition of spectra. 2 Library 3 Case studies: static science cleaning semiconductor materials imaging mechanism oxide growth use MS/MS techniques analysis devices. (Part contents).
amazon.com参考文章(0)