Fabrication of Two-Dimensional Gratings Using Photosensitive Gel Films and Their Characterization
作者： Noboru Tohge , Masaya Hasegawa , Naoki Noma , Kenji Kintaka , Junji Nishii
关键词: Materials science 、 Irradiation 、 Composite material 、 Optics 、 Sol-gel 、 Fabrication 、 Photosensitivity 、 Diffraction grating 、 Chemical modification 、 Leaching (metallurgy) 、 Laser
摘要: Two-dimensional (2D) surface-relief gratings have been fabricated by the two-beam interference method on photosensitive gel films, which are derived from chemically modified metal-alkoxides, and characterized with respect to surface morphology antireflection effect. Photosensitive ZrO2 film was deposited a silica glass substrate using sol that prepared Zr-tetrabutoxide benzoylacetone. The exposed fringe (1.0 μm period) of He-Cd laser then rotated 90° in its own plane, followed an additional exposure. Leaching ethanol gave lattice or island types 2D-gratings depending dose irradiation. changed irradiation time laser, leaching conditions so on. formation 2D-grating type substantially reduced reflection at wavelength range 1.3 2.6 μm.
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