Rigid design of fast scanning probe microscopes using finite element analysis.
作者： Johannes H Kindt , Georg E Fantner , Jackie A Cutroni , Paul K Hansma
DOI: 10.1016/J.ULTRAMIC.2003.11.009
关键词: Nanotechnology 、 Stiffness 、 Finite element method 、 Engineering design process 、 Materials science 、 Microscope 、 Acoustics 、 Actuator 、 Scanner 、 Rigidity (electromagnetism) 、 Fast scanning
摘要: To improve the performance of atomic force microscopes regarding speed and noise sensitivity, it is important to consider mechanical rigidity actuator (scanner), overall structure. Using finite element analysis in design process, was possible increase first resonance frequency from 950 Hz for whole system 23.4 kHz system. This constitutes a factor similar to25 625 stiffness and, hence, immunity. (C) 2004 Elsevier B.V. All rights reserved.
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sci-hub.se 参考文章(8)
Thomas R. Albrecht, Calvin F. Quate, Atomic resolution with the atomic force microscope on conductors and nonconductors Journal of Vacuum Science and Technology. ,vol. 6, pp. 271- 274 ,(1988) , 10.1116/1.575441
Mario B Viani, Tilman E Schäffer, Ami Chand, Matthias Rief, Hermann E Gaub, Paul K Hansma, None, Small cantilevers for force spectroscopy of single molecules Journal of Applied Physics. ,vol. 86, pp. 2258- 2262 ,(1999) , 10.1063/1.371039
D. A. Walters, J. P. Cleveland, N. H. Thomson, P. K. Hansma, M. A. Wendman, G. Gurley, V. Elings, Short cantilevers for atomic force microscopy Review of Scientific Instruments. ,vol. 67, pp. 3583- 3590 ,(1996) , 10.1063/1.1147177
J. M. Drake, J. Klafter, Special Issue: Dynamics of Molecular Systems Physics Today. ,vol. 43, pp. 23- 23 ,(1990) , 10.1063/1.881259
G. Schitter, A. Stemmer, F. Allgower, Robust 2 DOF-control of a piezoelectric tube scanner for high speed atomic force microscopy american control conference. ,vol. 5, pp. 3720- 3725 ,(2003) , 10.1109/ACC.2003.1240413
James B Thompson, Barney Drake, Johannes H Kindt, Jessica Hoskins, Paul K Hansma, Assessing the quality of scanning probe microscope designs Nanotechnology. ,vol. 12, pp. 394- 397 ,(2001) , 10.1088/0957-4484/12/3/331
T. Ando, N. Kodera, E. Takai, D. Maruyama, K. Saito, A. Toda, A high-speed atomic force microscope for studying biological macromolecules. Proceedings of the National Academy of Sciences of the United States of America. ,vol. 98, pp. 12468- 12472 ,(2001) , 10.1073/PNAS.211400898
G. Binnig, C. F. Quate, Ch. Gerber, Atomic force microscope Physical Review Letters. ,vol. 56, pp. 930- 933 ,(1986) , 10.1103/PHYSREVLETT.56.930