Proximity sensor nozzle shroud with flow curtain
作者： Herman Vogel
DOI:
关键词: Structural engineering 、 Flow (psychology) 、 Proximity sensor 、 Engineering 、 Immersion lithography 、 Lithography 、 Shroud 、 Acoustics 、 Crosswind 、 Plenum space 、 Nozzle
摘要: The present invention is directed to an apparatus for reducing the impact of cross winds on gas flow emitted from a nozzle. includes shroud that affixes A plenum located inside holds gas, which fed into through one or more intake holes. out series openings, such as holes slots, along bottom surface in direction away forms air curtain around nozzle prevent impacting In application, used with lithography gauge proximity sensor. can also be nozzles emit liquids, as, example, immersion
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