Method of performing model-based scanner tuning
作者： Jun Ye , Yu Cao
DOI:
关键词: Computer vision 、 Set (abstract data type) 、 Scanner 、 Lithography 、 Engineering 、 Artificial intelligence 、 Electronic engineering
摘要: A model-based tuning method for a first lithography system utilizing reference system, each of which has tunable parameters controlling imaging performance. The includes the steps defining test pattern and an model; measuring results; calibrating model results corresponding to where calibrated set parameter values; tuned second adjusting based on difference between values values.
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