MEMS-based nanoreactor for in situ analysis of solid–gas interactions inside the transmission electron microscope

摘要: A nanoreactor-based system for in situ analysis of solid–gas interactions inside the transmission electron microscope, referred to as ‘climate system’, is introduced here. The latter uses an micro-electro mechanical systems (MEMS)-based device a multi-functional sample carrier and microsized laboratory simultaneous heating gas experiments. To assemble nanoreactor, two chips are sandwiched together form minimised chemical reaction chamber. bottom chip contains four-point-probe microheater, which controls introduces environment (up 1300°C) around sample. Similarly, it spacers that define height top confines microchamber while isolating from external environment. Both contain transparent windows allow beam pass through imaging. can be deposited or prepared directly on windows, made silicon nitride sustain pressures up 1.5 bar high temperatures ensuring low background atomic resolution