Pattern formation method and substrate manufacturing apparatus

作者: Hiroshi Kiguchi , Tatsuya Shimoda , Satoshi Nebashi , Hitoshi Fukushima

DOI:

关键词: Structural engineeringSubstrate (printing)Head (vessel)Composite materialPattern formationChemistry

摘要: A pattern formation method for discharging a prescribed fluid onto substrate form an ink-jet head and forming arbitrary pattern. The including the steps of from ink jet defining pattern-forming region by subjecting to specific treatment prevent spreading. is formed after has been ejected so that in corresponding region. one which banks preventing flowing out are around also includes removing following

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