A new miniaturized surface micromachined tunneling accelerometer
作者： R.L. Kubena , G.M. Atkinson , W.P. Robinson , F.P. Stratton
DOI: 10.1109/55.496466
关键词: Accelerometer 、 Surface micromachining 、 Dynamic range 、 Electrostatic deflection (structural element) 、 Cantilever 、 Wafer 、 Silicon 、 Wide dynamic range 、 Optoelectronics 、 Materials science
摘要: The authors have fabricated a new class of miniaturized surface micromachined tunneling accelerometers. accelerometer structures are on the single silicon wafer and consist cantilevered beam with electrostatic deflection electrodes tip underneath. noise level resolutions in air 100-/spl mu/m 250-/spl mu/m-long cantilever devices 8.3/spl times/10/sup -4/ g/Hz/sup 1/2/ 8.5/spl -5/ at 500 respectively. operated force rebalance feedback mode using low automatic servocontrol circuit, providing dynamic range over 10/sup 4/ g. This technology provides extremely high sensitivity, bandwidth wide range, an ultracompact, low-cost package that is easily integrated control electronics.
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sci-hub.se 参考文章(7)
G. Binnig, D. P. E. Smith, Single-tube three-dimensional scanner for scanning tunneling microscopy Review of Scientific Instruments. ,vol. 57, pp. 1688- 1689 ,(1986) , 10.1063/1.1139196
S.B. Waltman, W.J. Kaiser, An electron tunneling sensor Sensors and Actuators. ,vol. 19, pp. 201- 210 ,(1989) , 10.1016/0250-6874(89)87073-8
H. Jonathon Mamin, Eric Ganz, David W. Abraham, Ruth Ellen Thomson, John Clarke, Contamination-mediated deformation of graphite by the scanning tunneling microscope Physical Review B. ,vol. 34, pp. 9015- 9018 ,(1986) , 10.1103/PHYSREVB.34.9015
G. Binnig, H. Rohrer, Scanning tunneling microscopy Ibm Journal of Research and Development. ,vol. 44, pp. 279- 293 ,(1986) , 10.1147/RD.441.0279
T. W. Kenny, S. B. Waltman, J. K. Reynolds, W. J. Kaiser, Micromachined silicon tunnel sensor for motion detection Applied Physics Letters. ,vol. 58, pp. 100- 102 ,(1991) , 10.1063/1.104432
Chingwen Yeh, K. Najafi, A low-voltage bulk-silicon tunneling-based microaccelerometer international electron devices meeting. pp. 593- 596 ,(1995) , 10.1109/IEDM.1995.499291
C. Yeh, K. Najafi, BULK-SILICON TUNNELING-BASED PRESSURE SENSORS 1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest. ,(1994) , 10.31438/TRF.HH1994.46