Process for filing micro-blind vias

作者: Kai-Jens Matejat , Oswald Igel , Herko Genth , Bernd Ottmar Roelfs , Akif Özkök

DOI:

关键词: PlatingPrinted circuit boardCurrent densityChemistryOxidizing agentInorganic chemistryGalvanic cellGalvanic bathElectrolyteDirect current

摘要: The invention provides a process for filling µ-blind vias in the manufacture of printed circuit boards, which comprises following steps: (i) providing bath electrolyte galvanic plating with metallic coatings comprising copper metal salt and optionally organic additives, (ii) operating direct current density 0.5 to 10 A/dm2, or pulses at an effective (iii) withdrawing part from bath, (iv) adding oxidizing agent has been withdrawn, (v) irradiating withdrawn UV light (vi) recycling replacing additives destroyed by oxidation treatment.

参考文章(6)
Eugene P. Foeckler, Sudarshan Lal, Treatment of electroless plating waste streams ,(1994)
Hideki Tsuchida, Shinjiro Hayashi, Masaru Kusaka, Method for electrolytic copper plating ,(2003)
John E. Pillion, Jieh-Hwa Shyu, Zhen Wu Lin, Brett Matthew Belongia, Method and system for regenerating of plating baths ,(2002)
Andreas Prof Dipl Chem Moebius, Wolfgang Dr Clauberg, Removal of breakdown products from electroplating baths ,(1995)
Reinhard Schneider, Petra Fromme, Rolf Schumacher, Helga Meyer, Walter Meyer, Silke Kaftanski, Wolfgang Dahms, Process and apparatus for electrolytic deposition of metal layers ,(1994)