Towards a Particle Based Simulation of Complex Plasma Driven Nanocomposite Formation
作者： M. Bonitz , L. Rosenthal , K. Fujioka , V. Zaporojtchenko , F. Faupel
关键词: Coalescence (physics) 、 Molecular dynamics 、 Nanocomposite 、 Materials science 、 Plasma 、 Cluster (physics) 、 Particle 、 Kinetic Monte Carlo 、 Phase (matter) 、 Nanotechnology 、 Chemical physics
摘要: An overview on particle-based simulation of nanocomposite formation in a magnetron plasma is given. After discussing recent kinetic Monte Carlo results for metal cluster growth and diffusion, new the co-sputtering polymer are presented. Then, second method based molecular dynamics discussed time-resolved coalescence two clusters shown. We conclude with an outlook prospects integrated coupled to surface deposition phase (© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
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