CHEMICAL RESUPPLYING SYSTEM AND SUBSTRATE PROCESSING SYSTEM
作者： Hashimoto Takahiro , Murakami Masaaki
DOI:
关键词: Substrate (printing) 、 Constant pressure 、 Buffer tank 、 Process engineering 、 Computer science
摘要: PROBLEM TO BE SOLVED: To compress and send chemicals such as developer into each processing unit at the specified constant pressure all times without producing pulsation of a pump. SOLUTION: Developer is compressed sent buffer tank 73 from supplying source through flowing path 71. The prescribed amount discharged developing (DEV) this 73. Then, every time discharge finished, resupplied source.
lens.org 参考文章(0)