Radio-frequency nanoelectromechanical system (rf nems) component comprising a nanoswitch with an improved contact
作者： Stéphane Xavier , Baillif Matthieu Le , Afshin Ziaei
DOI:
关键词: Materials science 、 Substrate (electronics) 、 Optoelectronics 、 Perpendicular 、 Nanoelectromechanical systems 、 Lateral element 、 Nanotechnology 、 Nanowire 、 Electrode 、 Radio frequency 、 Stripline
摘要: The subject of the invention is an RF component, comprising at least one coplanar stripline (Ls), with a metal area (M 1 , M 2 ) on surface substrate (S), and nanoswitching structure located between said area, lying parallel to each other along first direction, lateral elements (L sb1 L sb2 b11 b12 b21 b22 perpendicular characterized in that: element interacts metal-area ), which comprises series nanotubes or nanowires (Nb 11i Nb 12i via switching action that brings into direct contact stripline; and, furthermore electrode substrate, making it possible for be brought stripline.
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