Exploration of Oxide Semiconductor Electronics Through Parallel Synthesis of Epitaxial Thin Films
作者： M. Kawasaki
DOI: 10.1007/978-3-540-77968-1_4
关键词: Pulsed laser deposition 、 Photonics 、 Heterojunction 、 Epitaxy 、 Oxide 、 Nanotechnology 、 Thin film 、 Tunnel magnetoresistance 、 Light-emitting diode 、 Materials science
摘要: A review is given for advanced thin film technology based on pulsed laser deposition of oxide films. Atomically regulated epitaxy has been extended to various kinds oxides construct artificially made heterostructures. Computer controlled masking and target switching in have it possible integrate number films with different layered structures and/or compositions. This technique applied search new materials functionalities such semiconductors as ZnO TiO2. The highlights magnetic, photonic, electronic devices are introduced examples TiO2 ferromagnetic junctions, light emitting diodes, (Mg, Zn) O/ZnO quantum Hall devices, respectively.
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sci-hub.st 参考文章(97)
J.H. Haeni, C.D. Theis, D.G. Schlom, RHEED Intensity Oscillations for the Stoichiometric Growth of SrTiO3 Thin Films by Reactive Molecular Beam Epitaxy Journal of Electroceramics. ,vol. 4, pp. 385- 391 ,(2000) , 10.1023/A:1009947517710
K. Ando, H. Saito, Zhengwu Jin, T. Fukumura, M. Kawasaki, Y. Matsumoto, H. Koinuma, Large magneto-optical effect in an oxide diluted magnetic semiconductor Zn1−xCoxO Applied Physics Letters. ,vol. 78, pp. 2700- 2702 ,(2001) , 10.1063/1.1368375
M. Izumi, Y. Murakami, Y. Konishi, T. Manako, M. Kawasaki, Y. Tokura, Structure characterization and magnetic properties of oxide superlattices La 0.6 Sr 0.4 MnO 3 /La 0.6 Sr 0.4 FeO 3 Physical Review B. ,vol. 60, pp. 1211- 1215 ,(1999) , 10.1103/PHYSREVB.60.1211
The Hall effect and its applications Plenum Press. ,(1980) , 10.1007/978-1-4757-1367-1
J. G. Bednorz, K. A. M�ller, Possible high Tc superconductivity in the Ba-La-Cu-O system European Physical Journal B. ,vol. 64, pp. 189- 193 ,(1986) , 10.1007/BF01303701
R. B. van Dover, L. F. Schneemeyer, R. M. Fleming, Discovery of a useful thin-film dielectric using a composition-spread approach Nature. ,vol. 392, pp. 162- 164 ,(1998) , 10.1038/32381
T. Makino, Y. Segawa, M. Kawasaki, A. Ohtomo, R. Shiroki, K. Tamura, T. Yasuda, H. Koinuma, Band gap engineering based on MgxZn1−xO and CdyZn1−yO ternary alloy films Applied Physics Letters. ,vol. 78, pp. 1237- 1239 ,(2001) , 10.1063/1.1350632
Y. Yamada, H. Toyosaki, A. Tsukazaki, T. Fukumura, K. Tamura, Y. Segawa, K. Nakajima, T. Aoyama, T. Chikyow, T. Hasegawa, H. Koinuma, M. Kawasaki, Epitaxial growth and physical properties of a room temperature ferromagnetic semiconductor: Anatase phase Ti1−xCoxO2 Journal of Applied Physics. ,vol. 96, pp. 5097- 5102 ,(2004) , 10.1063/1.1758310
H. Chang, I. Takeuchi, X.-D. Xiang, A low-loss composition region identified from a thin-film composition spread of (Ba1−x−ySrxCay)TiO3 Applied Physics Letters. ,vol. 74, pp. 1165- 1167 ,(1999) , 10.1063/1.123475
A. Ohtomo, M. Kawasaki, T. Koida, K. Masubuchi, H. Koinuma, Y. Sakurai, Y. Yoshida, T. Yasuda, Y. Segawa, MgxZn1−xO as a II–VI widegap semiconductor alloy Applied Physics Letters. ,vol. 72, pp. 2466- 2468 ,(1998) , 10.1063/1.121384