Electron beam exciter for use in chemical analysis in processing systems
作者： P.L. Stephan Thamban , Matthew J. Goeckner , Andrew Weeks Kueny , Kenneth C. Harvey , Jimmy W. Hosch
DOI:
关键词: Energy-dispersive X-ray spectroscopy 、 Atomic physics 、 Electron density 、 Low-energy electron diffraction 、 Electron beam welding 、 Electron spectrometer 、 Scanning electron microscope 、 Electron beam-induced deposition 、 Electron 、 Chemistry
摘要: The present invention is directed to a gas line electron beam exciter, excitation system and method for exciting using an exciter. exciter generally comprises variable density source generating cloud of electrons in chamber energy extractor accelerating from the as into effluent stream fluorescing species effluent. variably controlled by adjusting power applied source. reside at reference electrical potential chamber, typically near ground potential. across extractor, which energizes through extraction hole toward extractor. greater difference between source, higher imparted beam. can be adjusted independently beam, thereby altering without changing level
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