Investigation on High-κ Dielectric for Low Leakage AlGaN/GaN MIS-HEMT Device, Using Material Selection Methodologies

作者: Baikadi Pranay Kumar Reddy , Karri Babu Ravi Teja , Kavindra Kandpal , None

DOI: 10.1134/S1063782618040073

关键词: Materials scienceOptoelectronicsDielectricGate dielectricHigh-electron-mobility transistorAluminium gallium nitrideGallium nitrideTransistorBand gapElectron mobility

摘要: This paper analyzes various high-κ dielectrics for low leakage AlGaN (Aluminium Gallium Nitride)/GaN (Gallium Nitride) MIS-HEMT (Metal Insulator Semiconductor—High Electron Mobility Transistor) device. The investigation is carried out by examining different attributes such as the dielectric constant, conduction band offset, and energy gap of which are crucial a good dielectric-AlGaN interface. work also computes values offsets to analytically. selection most promising done using three multi-criteria decision making methods (MCDM) namely Ashby, VIKOR (VIseKriterijumska Optimizacija I Kompromisno Resenje in Serbian, meaning Multicriteria Optimization Compromise Solution) TOPSIS (Technique Order Preference Similarity Ideal Solution). All analyses point La2O3 best gate AlGaN/GaN

参考文章(38)
Ching-Lai Hwang, Kwangsun Yoon, Methods for Multiple Attribute Decision Making Springer Berlin Heidelberg. pp. 58- 191 ,(1981) , 10.1007/978-3-642-48318-9_3
W. Krelle, C. L. Hwang, Martin J. Beckmann, Shu-Jen J. Chen, Multiple Attribute Decision Making: Methods and Applications ,(1981)
S. R. Lee, A. F. Wright, M. H. Crawford, G. A. Petersen, J. Han, R. M. Biefeld, The band-gap bowing of AlxGa1−xN alloys Applied Physics Letters. ,vol. 74, pp. 3344- 3346 ,(1999) , 10.1063/1.123339
S. P. Grabowski, M. Schneider, H. Nienhaus, W. Mönch, R. Dimitrov, O. Ambacher, M. Stutzmann, Electron affinity of AlxGa1−xN(0001) surfaces Applied Physics Letters. ,vol. 78, pp. 2503- 2505 ,(2001) , 10.1063/1.1367275
D. W. Niles, G. Margaritondo, Heterojunctions: Definite breakdown of the electron affinity rule Physical Review B. ,vol. 34, pp. 2923- 2925 ,(1986) , 10.1103/PHYSREVB.34.2923
Marleen Van Hove, Xuanwu Kang, Steve Stoffels, Dirk Wellekens, Nicolo Ronchi, Rafael Venegas, Karen Geens, Stefaan Decoutere, Fabrication and Performance of Au-Free AlGaN/GaN-on-Silicon Power Devices With ${\rm Al}_{2}{\rm O}_{3}$ and ${\rm Si}_{3}{\rm N}_{4}/{\rm Al}_{2}{\rm O}_{3}$ Gate Dielectrics IEEE Transactions on Electron Devices. ,vol. 60, pp. 3071- 3078 ,(2013) , 10.1109/TED.2013.2274730
J. Robertson, B. Falabretti, Band offsets of high K gate oxides on III-V semiconductors Journal of Applied Physics. ,vol. 100, pp. 014111- ,(2006) , 10.1063/1.2213170
Bo-Yi Chou, Ching-Sung Lee, Cheng-Long Yang, Wei-Chou Hsu, Han-Yin Liu, Meng-Hsueh Chiang, Wen-Ching Sun, Sung-Yen Wei, Sheng-Min Yu, TiO2-dielectric AlGaN/GaN/Si metal-oxide-semiconductor high electron mobility transistors by using nonvacuum ultrasonic spray pyrolysis deposition IEEE Electron Device Letters. ,vol. 35, pp. 1091- 1093 ,(2014) , 10.1109/LED.2014.2354643