Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts
作者： S. Jiguet , M. Judelewicz , S. Mischler , A. Bertch , P. Renaud
DOI: 10.1016/J.MEE.2006.01.068
关键词: Epoxy 、 Materials science 、 Photoresist 、 Nanoparticle 、 Internal stress 、 Coating 、 Nanocomposite 、 Filler (packaging) 、 Composite material 、 Frictional coefficient
摘要: The use of low-stress SU8 nanocomposites as a functional material for micro-parts and coating applications is described in this paper. It was found that the nanoparticles lower internal stress decrease wear rate frictional coefficient epoxy. applicability technology demonstrated on gear wheels configuration multilayer capping moving micro-parts.
elsevier.com
sci-hub.se 参考文章(7)
S. Mischler, A. Spiegel, M. Stemp, D. Landolt, Influence of passivity on the tribocorrosion of carbon steel in aqueous solutions Wear. ,vol. 251, pp. 1295- 1307 ,(2001) , 10.1016/S0043-1648(01)00754-2
S. Jiguet, A. Bertsch, H. Hofmann, P. Renaud, SU8-Silver Photosensitive Nanocomposite Advanced Engineering Materials. ,vol. 6, pp. 719- 724 ,(2004) , 10.1002/ADEM.200400068
Hyun-Kee Chang, Yong-Kweon Kim, UV-LIGA process for high aspect ratio structure using stress barrier and C-shaped etch hole Sensors and Actuators A-physical. ,vol. 84, pp. 342- 350 ,(2000) , 10.1016/S0924-4247(00)00408-8
H. Lorenz, M. Despont, P. Vettiger, P. Renaud, Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 4, pp. 143- 146 ,(1998) , 10.1007/S005420050118
H. Lorenz, M. Laudon, P. Renaud, Mechanical characterization of a new high-aspect-ratio near UV-photoresist Microelectronic Engineering. ,vol. 41, pp. 371- 374 ,(1998) , 10.1016/S0167-9317(98)00086-0
R. Bandorf, H. Lüthje, A. Wortmann, T. Staedler, R. Wittorf, Influence of substrate material and topography on the tribological behaviour of submicron coatings Surface & Coatings Technology. ,vol. 174, pp. 461- 464 ,(2003) , 10.1016/S0257-8972(03)00400-6
V. Seidemann, J. Rabe, M. Feldmann, S. Büttgenbach, SU8-micromechanical structures with in situ fabricated movable parts Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 8, pp. 348- 350 ,(2002) , 10.1007/S00542-002-0171-0